设备技术参数 Equipment technical parameters |
真空室材质 Vacuum chamber material | 不锈钢、碳钢 Stainless steel, carbon steel |
蒸镀方式 Metalizing mode | 单面镀膜、双面镀膜 Single side coating, double side coating |
蒸镀模式 Metalizing model | 感应蒸发 Induction of evaporation |
有效镀宽 Effective width of coating | 300mm-2000mm |
最大卷径 Max.rolling diameter | Φ400mm-Φ1000mm |
卷绕速度 Wind speed | 100m/min ~800m/min |
可镀材料 Can be plated material | 铝、锡、铜、铅等 Al, Sn, Cu, Pb, etc |
镀膜基材 Coating substrate | 金银线镀膜、电子屏蔽膜、锡箔纸等 Gold and silver wire coating, electronic shielding film, tin foil, etc |
常用真空抽气时间 Commonly used vacuum extraction time | 清洁容器抽至5.5×10-1pa≤5min Clean the container until 5.5×10-1pa≤5min |
极限真空抽气时间 Limit vacuum time | 清洁空容器抽至5×10-3Pa≤24h Clean empty containers and pump until 5×10-3pa≤24h |
极限压力(清洁、空载) Extreme pressure (clean, no load) | 5×10-3Pa |
水冷辊直径 Diameter of water-cooled roll | 320mm-800mm |
水冷辊冷冻工作温度 Water cooling roller freezing working temperature | -15℃~40℃ |
电源 The power supply | 直流、中频 Dc, if |
蒸发坩埚数量 Number of evaporation crucible | 6套(60KW每台) 6 sets (60KW per set) |
蒸镀厚度范围 Range of evaporation thickness | 0.03Ω-50Ω |
厚度均匀率 Uniform thickness | +/-5% |
卷绕系统 The winding system | 采用原装西门子恒张力全自动收放卷系统 The original Siemens constant tension automatic winding and unwinding system is adopted |
舒展系统 Stretch system | 电动可调360º舒展系统 Electrically adjustable 360 ° stretch system |
驱动电机 Drive motor | 西门子电机 Siemens motor |
气胀轴 Inflatable shaft | 胀块式、键条式等 Bulk-type, key-bar type, etc |
气胀轴直径 Inflation axis diameter | 3″、 6″气胀轴 3 ", 6 "gas expansion axis |
真空系统 Vacuum system | ZJ600罗茨泵,速度为600升/秒 ZJ600 roots pump, speed is 600 L/S |
ZJ1200罗茨泵,速度为1200升/秒 ZJ1200 roots pump, speed 1200 L/S |
KT800扩散泵,每台速度24000升/秒 KT800 diffusion pump at a speed of 24,000 L/S |
2H150滑阀泵,每台速度150升/秒 2H150 slide valve pump, 150 L/S per set |
2X-15旋片泵,每台速度15升/秒 2X-15 rotary vane pump, speed 15 L/S per unit |
Z600油增压泵,每台速度30000升/秒 Z600 oil booster pump, each speed 30000 L/S |
冷暖交换机组 Heating and cooling exchange unit |
深冷捕集器 Cryogenic trap |
功率 power | 120KW-150KW |
电源 The power supply | 380V 三相五线 380V Three phase five wire |